Engesser, Manuel:
ISBN 9783862470754

Miniaturization limits of MEMS accelerometers. Microsystem Simulation, Design and Manufacture Vol. 5 # Pb., Großformat (24 x 17,5) 132 S., 33 Abb., davon 4 in Farbe, 7 Tab.

SCHLAGWORTE:
Microelectromechanical Systems
MEMSAccelerometer
Reliability-Based Design Optimization
RBDO
Parameter Optimization
Six-Sigma Methodology, Miniaturization

Accelerometers based on microelectromechanical systems (MEMS) offer a wide range of applications. For instance, they are used in cars for crash detection and consequent release of airbags, or in mobile phones for identification of motion and orientation. Highly miniaturized devices are particularly necessary for such mobile applications, in order to be able to satisfy customer demands from the consumer industry. The widely-used capacitive transducer has a low further shrinking potential and therefore alternative principles have to be considered. In this thesis, first a preselection of alternative principles is presented and analytical models are derived. Then a reliability-based design optimization (RBDO) methodology is introduced. This parameter optimization, which simultaneously considers manufacturing tolerances, enables an investigation of the miniaturization limits of the different principles. The final result is promising. The field-effect transducer enables a sensor area which is approximately factor three lower than a comparable state-of-the-art capacitive accelerometer. An even smaller sensor area can be achieved with the piezoresistive transducer where an additional area reduction of up to 25% is possible.


Manuel Engesser received the Diploma degree in mechatronics in 2005 from Furtwangen University, Germany. While working as a development engineer in the R&D-sector, he received the M.Sc. degree in virtual engineering in 2007 from Furtwangen University. Afterwards he proceeded towards the Ph.D. degree as a Research Scientist with the Microsystem Technologies Department, Corporate Sector Research and Advance Engineering, Robert Bosch GmbH, Stuttgart, Germany and at the Institute of Microsystem Technology, Laboratory for Simulation at the University of Freiburg, Germany. His research interests include all kind of simulation topics particularly parameter optimization and Six Sigma methodologies.

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