Scheer, Hirai, Nishihata, Bogdanski:
Scheer, Hella-Christin, Yoshihiko Hirai, Masayoshi Nishihata und Nicolas Bogdanski:
Polymer elasticity effects during thermal nanoimprint.
Part I: Experimental evidence and simulation.
Part II: Analysis with respect to imprint.
Mikro- und Nanostrukturierung Bd. 2 # Pb., 96 S., 21 Abb., davon 19 in Farbe
statistical network theory
Nanoimprint is a low-cost method to define nanometre-sized patterns. When thermal imprint is performed at low temperatures into thin polymeric layers, elastic effects of the polymer response may affect the imprint result.
In a first part, the elastic behaviour during the first moments of imprint is simulated with a commercially available program for rubber elasticity. The underlying theory and the simulation results are addressed for different stamp cross-sections in linear and rotational geometry. The reader who is familiar with this type of simulation may skip this part.
In a second part, the impact of the simulation results for a thermal imprint process is discussed, taking the example of a line, a lens and a pad imprint. From the stresses and strains calculated the time-evolution of a thermal imprint as measured can be well understood on a novel physical basis.