Hildenbrand, Jürgen:
ISBN 9783862470112

MEMS-Based Thermal Emitters and Beyond. Components and Investigations for Miniaturised NDIR Systems. Microsystem Simulation, Design and Manufacture, IMTEK Freiburg Vol. 2 # Pb., Großformat (24x17), 186 S., 91 Abb., 4 Tab.

SCHLAGWORTE:
thermal emitter
absoption spectroscopy
infrared
MEMS
micro hot-plate

This thesis is focused on the development of components for NDIR absorption spectroscopy. The system performance is determined by the right combination of suited components. Therefore, novel thermal emitters were developed within this thesis with improved spectral emission and optimised for fast transient operation. The developed designs were investigated theoretically by numerical simulation before the emitter fabrication. The characterisation processes comprise both electro-thermal investigations and spectral measurements of the emitted radiation, and the determination of the optical power.
Another important component of a NDIR system is the measurement cell. Here a White cell configuration was used to develop a small absorption cell with a multiply folded optical path. Additionally, an accumulating method for sensitivity enhancement for non- continuous measurements was worked out and tested. The advantage of this method lies in the possibility of micro integration using MEMS technologies.
Finally, a system for ethylene monitoring for fruit ripening in store-houses was developed, based on the developed broadband emitter and the White cell.

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