Durrer , Lukas :
ISBN 9783862470327

Controlled Single-Walled Carbon Nanotube Growth for Sensing Applications. Scientific Reports on Micro and Nanosystems Vol. 10 # Pb., Großformat (24x17), 168 S., 72 Abb., 15 Tab.

Single-walled carbon nanotubes (SWNTs) show exceptional mechanical, electrical and electromechanical properties, making them promising candidates for future applications: as transducers in chemical, biochemical, and electromechanical sensors. This thesis focuses on the controlled growth of SWNTs by chemical vapor deposition (CVD) and on the development of a batch integration process based on standard UV lithography for the production of high quality carbon nanotube based field effect transistors (CNFETs) that consist of individual SWNTs to be used for sensing applications. Using the Fe storage protein ferritin for catalyst preparation and by optimizing the CVD growth parameters, clean SWNTs with low defect densities were grown on 200nm thick silicon gate oxide. The SWNT density was controlled by the concentration of the ferritin in the adsorption solution, the diameter by the ferritin loading time and by velocity sedimentation centrifugation of ferritin. In the developed batch integration process, SWNTs were grown from structured catalyst islands and then contacted by Pd electrodes. Beside high on state currents in CNFETs, narrow threshold value distributions were observed when cleaning the devices for three days followed by an annealing step and subsequent protection by atomic layer deposited Al2O3.

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