Kratt, Kai:
ISBN 9783862470709

Microcoils manufactured with a wire bonder. Microactuators - Design and Technology Vol. 5 # Pb., (Großformat 24 x 17), 198 S., 88 Abb., davon 19 in Farbe,13 Tab.

SCHLAGWORTE:
Luftspule
Mikrosystemtechnik
NMR-Tomographie
Golddraht
Drahtbonder

Microcoils, and therefore inductors, are crucial passive devices in mobile phones, tablet PCs and GPS devices. Beyond their use in electronics, they are also essential components of microactuators, transformers, and sensors for microscale magnetic resonance imaging. Planar microcoils are fabricated using standard methods, though their performance is inferior compared to three-dimensional microcoils. However, the production of three-dimensional microcoils has, in the past, involved high process complexity. This work exploits the potential of an automatic wire bonder used in conjunction with traditional MEMS technologies to produce high quality, three-dimensional microcoils in a straightforward process. The thesis thus reports on the mechanical and electrical characterisation of coils with submillimetre diameters. The principal application of these coils is magnetic resonance imaging, where they serve as transmitter/receiver units. The coils enable the interior of Eremosphaera viridis alga cells to be viewed and structures to be delineated with an isotropic resolution of 10 µm. In addition to magnetic resonance imaging, the manufactured inductors find application in energy harvesting devices, for magnetic levitation and as a terahertz metamaterial.

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