Schonhardt, Stefan:
ISBN 9783899598698

Electromagnetic Comb-Drives. Microactuators - Design and Technology Vol. 2 # Pb., Großformat (24x17), 146 S., 92 Abb., 13 Tab.

SCHLAGWORTE:
Electromagnetic Reluctance Actuator
Comb-Drive
System Stability

Magnetic microactuators are of increasing interest in Microsystems technology because they allow for large actuation forces and don't require a complex driving circuitry. The performance of electromagnetic linear drives strongly depends on the magnetic material properties and on the dimensions of the air-gap width in between the stator and the moving plunger. Small air gaps in order to obtain large actuation forces, however, require a highly sophisticated fabrication process and render the actuators delicate to handle. The present work examines the influence of the actuator geometry and the air gap shape on its performance. It reports on the design and fabrication in LIGA technology of a novel actuator type featuring a comb like design. The fabricated actuators are shown to be vice versa usable as position sensors if the plunger is displaced externally. Different configurations and materials are analyzed, and numerically as well as experimentally evaluated.




Stefan Schonhardt studied Microsystemtechnology at the University of Freiburg and concluded his studies with a diploma with Prof. Dr. Arokia Nathan at the Univerisity of Waterloo (Canada). For his doctoral thesis he worked at the Department of Microsystems Engineering in the Laboratory for Microactuators of Prof. Ulrike Wallrabe at the University of Freiburg.

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