Chen, Tzung-Ming:
ISBN 9783899598988

Synthesis of Compliant Single Crystal Silicon Mechanisms with Large Deformation. Microactuators - Design and Technology Vol. 3 # Pb., Großformat (24x17), 144 S., 100 Abb., davon 1 in Farbe, 8 Tab.

SCHLAGWORTE:
Compliant mechanism
Single crystal silicon
Topology optimization

Single crystal silicon (SCS) has been well used as MEMS structural devices, because of its high Young's modulus and the support of the availability of processing equipments. In order to apply SCS functional devices with large deformation, a 4-level systematic design procedure for SCS compliant mechanisms is introduced in this work. Topology optimization and shape modification are used to generate a manufacturable structural design. Before the fabrication, the stress analysis on the crucial beam is the key point to choose the correct orientation of a designed structural device with respect to the crystalline directions. This helps to avoid crystal slip and maintain the material reliability of a large deformed SCS compliant mechanism. A good and multiple communication between the level of shape modification and the level of fabrication let the systematic design fulfill the predicted function of SCS thin beam compliant mechanisms.


Tzung-Ming Chen was born in Taiwan, and studied his M.S. at the National Taiwan University of Science and Technology in Taipei. He did his doctoral thesis at the Department of Microsystems Engineering (IMTEK) in the Laboratory for Microactuators of Prof. Ulrike Wallrabe at the University of Freiburg from 2005 to 2009. His research focused on design procedures, MEMS structural optimization and fabrication procedures.

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